Imec opens NanoIC pilot line cleanroom to drive sub-2nm chip R&D

Imec has inaugurated a 2,000 m² cleanroom expansion at its Leuven headquarters as a key step in deploying Europe’s NanoIC pilot line for advanced semiconductor research. The opening gathered senior European and Belgian officials, including European EVP Henna Virkkunen, Belgian Prime Minister Bart De Wever, Flemish Minister-President Matthias Diependaele and ASML CEO Christophe Fouquet, alongside representatives from industry, startups, the NanoIC pilot line consortium and policymakers from the EU, Belgium and Flanders.

With a capacity of over 12,000 m², imec’s cleanroom is positioned as a central asset for the European Chips Act, which aims to place Europe at the leading edge of next generation semiconductor innovation and manufacturing. The expanded facility is presented as a strategic investment to strengthen the continent’s industrial base in the era of Artificial Intelligence, with a focus on long term economic growth, security and prosperity.

Imec CEO Luc Van den hove said that since announcing in May 2024 that imec would host the NanoIC pilot line, the organization has accelerated tool acquisition and launched a comprehensive recruitment program. He stated that the inauguration of the 2,000 m² cleanroom extension at the imec premises is the culmination of this effort, and that it will house a best in class toolset, including ASML’s next generation High NA EUV scanner that is scheduled to arrive mid-March, supporting research into sub-2nm systems-on-chip.