ASML High NA EUV enters Intel production

ASML said Intel Foundry is using its High NA EUV technology on the Intel 18A process node to produce a subset of Intel Core Ultra Series 3 processors. The move is positioned as a production milestone for high numerical aperture extreme ultraviolet lithography, a process developed by ASML to support more precise patterning in advanced chip manufacturing.

The processors, code-named Panther Lake, are built on Intel 18A. Applying High NA EUV to specific layers gives ASML and Intel Foundry data to improve system setup, up time and manufacturing implementation, with the goal of preparing the technology for broader adoption and fuller use of its capabilities.