Shanghai firm starts limited DUV lithography production

Shanghai Yuliangsheng Technology has reportedly begun limited production of immersion DUV lithography machines, according to sources close to The Information. The Shanghai-based company aims to produce five systems for delivery this year and estimates output of about 20 immersion DUV machines by 2027, marking a push to reduce reliance on suppliers such as ASML. Initial deliveries are planned for SMIC, CXMT, and Hua Hong, which will integrate the systems into production processes.

Immersion deep ultraviolet machines use an argon-fluoride excimer laser to generate DUV light at a 193 nm wavelength. The light passes through ultra-purified water above the final lens to imprint circuit designs on wafers. The effort remains small compared with ASML, which shipped 131 immersion DUV machines last year. Some key components for the Chinese systems are still imported from Japan, while most are sourced domestically.